Vacuum Pumps
Discover our full portfolio of efficient and reliable vacuum pumps. Our range of high-quality vacuum pumps include dry and wet technologies such as screw, rotary vane, scroll pumps, turbomolecular, diffusion pumps, liquid ring vacuum pumps and more. Offering excellent corrosion resistance, low vibration, and quiet operation, our pumps are engineered to handle even the toughest of applications. Every Edwards pump and component will live up to its trusted name in vacuum technology.
Pumps
Category
- Cryo Technology (2)
- Diffusion Pumps (122)
- Dry Claw Pumps (13)
- Dry Screw Pumps (176)
- Liquid Ring Pumps Double-Stage Plate (28)
- Liquid Ring Pumps Single-Stage Plate (112)
- Mechanical Booster Pumps (32)
- Oil Injected Screw Pumps (20)
- Oil Rotary Vane Pumps Single-Stage (3)
- Oil Rotary Vane Pumps Two-Stage (10)
- Rotary Piston Pumps (18)
- Turbomolecular Pumps MAG (4)
- Turbomolecular Pumps Mechanical (47)
Connection vacuum outlet flange
- 2" NPT Female (8)
- 3" NPT Female (10)
- ASA/ANSI 1 1/2" (4)
- ASA/ANSI 10" (2)
- ASA/ANSI 2 1/2" (4)
- ASA/ANSI 2" (11)
- ASA/ANSI 3" (6)
- ASA/ANSI 4" (30)
- DN 10 ISO-KF (NW10) (9)
- DN 100 (16)
- DN 100 ISO-F (23)
- DN 125 (9)
- DN 150 (18)
- DN 16 ISO-KF (NW16) (14)
- DN 160 ISO-F (24)
- DN 200 (10)
- DN 25 ISO-KF (NW25) (47)
- DN 250 (6)
- DN 250 ISO-F (9)
- DN 300 (3)
- DN 40 ISO-F (10)
- DN 40 ISO-KF (NW40) (98)
- DN 50 (17)
- DN 50 ISO-KF (NW50) (88)
- DN 60 (10)
- DN 63 ISO-F (1)
- DN 63 ISO-K (5)
- DN 65 (22)
- DN 80 (6)
- Edwards EHVI (4 x 16.70 mm holes on 235.0 PCD) (8)
- Edwards EHVI - 2" union (24)
Connection Vacuum Inlet Flange
- ASA/ANSI 10" (2)
- ASA/ANSI 12" (24)
- ASA/ANSI 2 1/2" (4)
- ASA/ANSI 2" (10)
- ASA/ANSI 3" (13)
- ASA/ANSI 4" (16)
- ASA/ANSI 6" (6)
- DN 100 (12)
- DN 100 CF (6") (9)
- DN 100 ISO-F (61)
- DN 100 ISO-K (14)
- DN 125 (9)
- DN 150 (22)
- DN 160 CF (8") (7)
- DN 160 ISO-F (102)
- DN 160 ISO-K (9)
- DN 200 (16)
- DN 200 CF (10") (3)
- DN 200 ISO-F (2)
- DN 200 ISO-K (4)
- DN 250 (6)
- DN 250 ISO-F (4)
- DN 250 ISO-K (9)
- DN 300 (3)
- DN 320 ISO-F (26)
- DN 350 PN6 (3)
- DN 40 ISO-F (6)
- DN 40 ISO-KF (NW40) (3)
- DN 50 (17)
- DN 500 ISO-K (1)
- DN 500 PN6 (6)
- DN 63 CF (4.5") (3)
- DN 63 ISO-F (57)
- DN 63 ISO-K (6)
- DN 65 (22)
- DN 80 (10)
- Edwards EHVI (12 x 20.60 mm holes on 686.0 PCD) (8)
- Edwards EHVI (8x11 mm holes on 387.4 PCD) (24)
Cooling Method
- Air Cooling (67)
- Air Cooling (convection) (46)
- Air Cooling (forced - fan) (254)
- Water Cooling (587)
- Water Cooling direct (24)
- Water Cooling Indirect (6)
Pressure Differential Max. @50Hz
- 7000.00 Pa (2)
- 9000.00 Pa (9)
- 12000.00 Pa (10)
- 19000.00 Pa (2)
Power Total Rated
- 80.00 W (14)
- 160.00 W (17)
- 450.00 W (9)
- 500.00 W (5)
- 650.00 W (12)
- 660.00 W (9)
- 750.00 W (4)
- 1100.00 W (4)
- 1350.00 W (12)
- 1450.00 W (3)
- 11000.00 W (53)
- 1.100 10⁵ W (7)
- 12000.00 W (21)
- 1.320 10⁵ W (7)
- 15000.00 W (17)
- 1.600 10⁵ W (6)
- 18500.00 W (29)
- 19000.00 W (3)
- 2200.00 W (4)
- 2250.00 W (9)
- 2350.00 W (3)
- 22000.00 W (39)
- 22500.00 W (8)
- 2.500 10⁵ W (3)
- 29500.00 W (19)
- 29820.00 W (2)
- 3000.00 W (9)
- 3700.00 W (4)
- 3850.00 W (3)
- 30000.00 W (16)
- 37000.00 W (11)
- 4000.00 W (8)
- 4100.00 W (8)
- 40000.00 W (1)
- 45000.00 W (6)
- 5500.00 W (17)
- 5600.00 W (4)
- 55000.00 W (5)
- 56000.00 W (3)
- 6000.00 W (72)
- 7500.00 W (63)
- 7700.00 W (9)
- 75000.00 W (7)
- 90000.00 W (2)
Pressure Differential Max. @60Hz
- 5000.00 Pa (2)
- 6700.00 Pa (10)
- 7500.00 Pa (9)
- 12000.00 Pa (2)
Pressure Ultimate
- -2.000 10² Pa (1)
- 3000.00 Pa (68)
- 3300.00 Pa (70)
- 7.000 10⁻⁷ Pa (3)
- 0.700 Pa (19)
- 8.00 Pa (3)
- 1.000 10⁻⁶ Pa (6)
- 1.000 10⁻⁸ Pa (2)
- 10.00 Pa (23)
- 1.000 Pa (52)
- 0.100 Pa (97)
- 1.000 10⁻² Pa (80)
- 1.000 10⁻⁵ Pa (5)
- 2.000 10⁻⁸ Pa (1)
- 20.00 Pa (1)
- 0.020 Pa (2)
- 3.000 10⁻⁶ Pa (42)
- 3.000 10⁻⁸ Pa (2)
- 30.00 Pa (2)
- 3.00 Pa (6)
- 33.00 Pa (2)
- 3.30 Pa (18)
- 0.330 Pa (10)
- 35.00 Pa (18)
- 40.00 Pa (2)
- 5.000 10⁻⁷ Pa (10)
- 5.000 10⁻⁸ Pa (9)
- 50.00 Pa (3)
- 5.00 Pa (4)
- 6.000 10⁻⁶ Pa (5)
- 60.00 Pa (1)
Pumping Speed @50Hz
- 0.107 m³/s (1)
- 0.123 m³/s (10)
- 0.178 m³/s (1)
- 2.00 m³/s (2)
- 0.210 m³/s (1)
- 0.023 m³/s (6)
- 0.222 m³/s (1)
- 0.023 m³/s (1)
- 0.044 m³/s (5)
- 0.045 m³/s (1)
- 0.065 m³/s (8)
- 0.067 m³/s (1)
- 0.071 m³/s (5)
- 0.072 m³/s (1)
- 0.861 m³/s (2)
Pumping Speed @60Hz
- 0.118 m³/s (1)
- 0.123 m³/s (10)
- 0.210 m³/s (1)
- 0.222 m³/s (1)
- 2.40 m³/s (2)
- 0.025 m³/s (6)
- 0.028 m³/s (1)
- 0.054 m³/s (5)
- 0.056 m³/s (1)
- 0.065 m³/s (8)
- 0.081 m³/s (1)
- 0.084 m³/s (1)
- 0.085 m³/s (5)
Rotational Speed @60Hz Nominal
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