1. Home
  2. Pumps
  3. Cryo Technology
  4. CTI On-Board Cryopump
  5. On-Board 10

Specifications

Connection Inlet / Outlet Flange /

ON BRD 10,CP,W/O EXHAUST PURGE,F-MDL

Part Number: 3620-01737
Product Details
Specifications

General Product Information

Weight 43.00
Certification of Product UL (61010-1 3rd Edition)
IEC61010-1
EMC (EU/UK)
KC
SEMI-F47
Connection Inlet / Outlet Flange /
Dimension Comments The dimensions length, width and height try to describe the outer shape of this particular product in its typical orientation when standing on the ground. We always recommend checking the detailed dimensions given in 2D drawings in the instruction manual or the 3D shapes given in 3D models.

Classification

Classification Dry or Wet Pump Dry

Performance Data

Pumping Speed Air Nitrogen (@50Hz or max @default setting) 3.00
Pumping Speed Argon 2.50
Pumping Speed Hydrogen 5.00
Pumping Speed Water 9.00
Cryopump Gas Capacity Argon (Standard Liters) 2.00
Cryopump Gas Capacity Hydrogen (Standard Liters) 0.024
Documents