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Specifications

Connection Inlet / Outlet Flange /

ON BRD 10,CP,W/O EXHAUST PURGE,F-MDL

Part Number: 8116764G003

Variant

Explore the range of variants given below to compare the product

Short Description Part Number
ON BRD 10,CP,W/O EXHAUST PURGE,F-MDL
3620-01737
ON BRD 10,CP,W/O EXHAUST PURGE,F-MDL
8116764G003
Product Details
Specifications

General Product Information

Weight 43.00
Certification of Product UL (61010-1 3rd Edition)
IEC61010-1
EMC (EU/UK)
KC
SEMI F47
Connection Inlet / Outlet Flange /
Dimension Comments The dimensions length, width and height try to describe the outer shape of this particular product in its typical orientation when standing on the ground. We always recommend checking the detailed dimensions given in 2D drawings in the instruction manual or the 3D shapes given in 3D models.

Classification

Classification High / Medium / Rough Vacuum pump High Vacuum Pump
Classification Dry or Wet Pump Dry

Connectivity - Communication Interface

Communication Interfaces Customer RS232 (serial)

Performance Data

Pumping Speed Air Nitrogen 3.00
Pumping Speed Argon 2.50
Pumping Speed Hydrogen 5.00
Pumping Speed Water 9.00
Cryopump Gas Capacity Argon (Standard Liters) 2.00
Cryopump Gas Capacity Hydrogen (Standard Liters) 0.024
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